PlasmaProTM 800Plus - Open-loading Plasma Etch & Deposition Tool

PlasmaPro 800Plus RIE-PE

A flexible solution for plasma etching and deposition processes on large wafer batches and 300 mm wafers, in a compact footprint, open-loading system.

Allowing maximum process flexibility for compound semiconductor, optoelectronics, and photonics applications, the PlasmaPro 800Plus can be configured for:

• Inductively Coupled Plasma (ICP) etching and deposition (ICP-PECVD)
• Reactive ion etching (RIE)
• Plasma etching (PE)
• Plasma enhanced chemical vapour deposition (PECVD)
• The large wafer platen allows for production scale batch processing and 300 mm wafer handling

Key features

• Up to 40 x 2", 19 x 3", 10 x 4", 2 x 6" or one 8"/200 mm or 12"/300 mm wafer(s) can be loaded
• Substrate temperature control is provided up to 400 °C
• Endpoint detection by laser interferometry and/or optical emission spectroscopy can be fitted to the Plasmalab800Plus to enhance etch control
• Options of a 6- or 12-line gas pod provides flexibility in processes and process gases, and may be remotely sited in the service area, away from the main process tool

• Images 
• Process Techniques 
• Processes 
• Support 
•  

PlasmaPro 800Plus Process Techniques

• Reactive Ion Etch (RIE)
• Reactive Ion Etch - Plasma Etch (RIE-PE)
• Plasma Enhanced Chemical Vapour Deposition (PECVD)

 

We work closely with our customers to develop new and customised processes according to their application needs; please contact us for details.

PlasmaPro 800Plus Processes

Contact us for details in our process performance datasheets, for example:

• SiO2 and SiNx deposition and etch
• HBLED production processes for hard mask deposition and etch and passivation deposition
• 300mm failure analysis and wafer-scale de-processing solutions in the PlasmaPro FA300 system

 - A Global Reach

Oxford Instruments is committed to supporting our customers’ success. We recognise that this requires world class products complemented by world class support. Our global service force is backed by regional offices, offering rapid support wherever you are in the world.

Service Centres*		Parts Centres
Europe & Middle East Montevrain, France Wiesbaden, Germany Haifa, Israel St Petersburg, Russia Moscow, Russia Bristol, UK USA Arizona, USA Texas, USA San Francisco, CA, USA Concord, MA, USA	Asia Beijing, China Guangzhou, China Shanghai, China Hong Kong New Delhi, India Mumbai, India Calcutta, India Bangalore, India Tokyo, Japan Kyungki-do, Korea Penang, Malaysia Singapore Taiwan County, Taiwan	Asia Shanghai, China Taiwan County, Taiwan EMEA Bristol, UK USA Concord, MA, USA
*Includes agents with OIPT trained engineers

For information on our Flexible Support Agreements please visit our Support pages