PlasmaProTM System133 - Batch Plasma System

PlasmaPro System133 Production tool

The PlasmaPro System133 tool has up to 300mm single wafer and large batch production capability, offering excellent uniformity and high throughput on a range of applications.

Applications and Processes

HBLED’s: industry-leading batch production performance for:

GaN, AlGaN and related materials
sapphire and SiC substrate etch

300mm SiO2, SiNx deposition
Diamond-like-carbon (DLC) deposition and etch
PECVD Etch

Images
Process Control
Process Techniques
Wafer Handling
Support

Process Control

Large wafer area and batch process end-pointing by optical emission spectrometry (OES):

OES detects changes in etch by-products or depletion of reactive gas species
Predictive chamber cleaning end-pointing
Integrated with the PC2000TM process tool software
Laser end-point detection (LEPD) also available for blanket etching or where mask patterns allow, or for deposition monitoring

PlasmaPro System133 Process Techniques

Inductively Coupled Plasma (ICP)
Inductively Coupled Plasma Chemical Vapour Deposition (ICP CVD)
Plasma Enhanced Chemical vapour deposition (PECVD)
Reactive Ion Etch (RIE)

PlasmaPro System133 Production Wafer Handling

Up to 300 mm single wafer or cassette load

Multi-wafer batch processing for 2", 3" and 4" including cassette loading of batch carrier plates

Cassette-to-cassette handling with full wafer tracking and individual wafer process control where required

Hexagonal or square robotic handlers, with MESC compatibility allowing further addition of third-party modules

E-chuck and/or mechanical clamping options, with He wafer backside cooling

Wide temperature range substrate electrodes: -150°C to 400°C or 700°C

- A Global Reach

Oxford Instruments is committed to supporting our customers’ success. We recognise that this requires world class products complemented by world class support. Our global service force is backed by regional offices, offering rapid support wherever you are in the world.

Service Centres*

Parts Centres

Europe & Middle East

Montevrain, France
Wiesbaden, Germany
Haifa, Israel
St Petersburg, Russia
Moscow, Russia
Bristol, UK

USA

Arizona, USA
Texas, USA
San Francisco, CA, USA
Concord, MA, USA

Asia

Beijing, China
Guangzhou, China
Shanghai, China
Hong Kong
New Delhi, India
Mumbai, India
Calcutta, India
Bangalore, India
Tokyo, Japan
Kyungki-do, Korea
Penang, Malaysia
Singapore
Taiwan County, Taiwan

Asia

Shanghai, China
Taiwan County, Taiwan

EMEA

Bristol, UK

USA

Concord, MA, USA

*Includes agents with OIPT trained engineers

For information on our Flexible Support Agreements please visit our Support pages

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