Optofab®3000 - System for High Quality Optical Coatings

High-speed specimen holder
with uniformity sheild

Optofab3000 - Specifically developed for high quality optical applications

Including High Reflective and Anti Reflective Coatings, the Optofab3000 is based on the proven architecture of the Ionfab300Plus – offering the same features and benefits of the Ionfab300Plus with added capabilities.

High speed 8” specimen holder fitted to the system
Option to use uniformity shields, offering improvements in layer uniformity
High deposition rate is achievable through the use of the 15cm ion source
Excellent refractive index results may be achieved with the use of an assist source
Option to use a white light optical monitor is available with the Optofab3000 patented holder

Optofab3000 Ion Source

Leading ion source and grid set technology
Grids are designed to suit specific applications: high uniformity, high rate, & low energy
Specific deposition grid sets to suit multiple targets, offer superior utilisation of target material
A full range of etch source options up to 35cm
Dual beam configurations (etch plus deposition source) offer the possibility to add capping layer immediately after etch, without exposing the process chamber or wafer to atmosphere
Increased deposition rates by using etch source as a plasma radical source (IASD)

Images
Substrate handling
Process Control
Applications
Support


Simulation of a high performance optical filter by an integrated software package	In-situ monitoring of optical coating deposition by an integrated software package	Multi-layer optical coating design by an integrated software package

Flexibility in a single tool

Handles from small pieces, through 100 mm (4 inch), up to 200 mm (8 inch) wafers
Ability to clamp any shape, and design unique carrier plates
Wafer handling options
Manual loading for one-off trials
Load-lock for faster trials
Cassette-to-cassette loading/unloading for batch production
Clusterable with other process tools including Oxford Instruments’ PlasmaPro plasma etch, deposition and sputtering tools, and FlexAL atomic layer deposition (ALD) tools
Simple upgrade options to add etch and deposition sources

Optofab3000 Process Control

Tiltable substrate holder can be angled from -90° up to +75° (depending upon configuration)
Enables ‘blazed’ gratings
Allows sidewalls to be cleaned off or etched
Angle control of substrate relative to deposition target ensures excellent deposition uniformity

Platen rotation speed

Variable platen rotation speed enables deposition rate to be controlled specifically for the application Standard and high speed platen options

Substrate cooling

Prevents degradation of substrate and devices structures/other materials already in place
Option for wafer backside cooling with He (turbo-pump) or Ar (cryo-pump)

Process monitoring

Etch endpoint monitoring by SIMS for multi-material applications
Deposition process monitoring

Crystal monitor (single or dual head)
White Light Optical Monitor (WLOM)

Chamber gas identification, partial pressure control and leak checking via RGA

Typical applications and materials:

IR detectors
CdHgTe (CMT) etch
VOx deposition and etch
Metal contact and track etch
Cu, Ni, Al…
Noble metals: Au, Pt, Pd…
Diffraction gratings

SiO2 ‘blazed’ etch
Spintronics and MRAM
AR and HR coatings for laser bars
Telecom filters
III-V photonics etching
Thin film magnetic hard disk heads (TFMH)

- A Global Reach

Oxford Instruments is committed to supporting our customers’ success. We recognise that this requires world class products complemented by world class support. Our global service force is backed by regional offices, offering rapid support wherever you are in the world.

Service Centres*

Parts Centres

Europe & Middle East

Montevrain, France
Wiesbaden, Germany
Haifa, Israel
St Petersburg, Russia
Moscow, Russia
Bristol, UK

USA

Arizona, USA
Texas, USA
San Francisco, CA, USA
Concord, MA, USA

Asia

Beijing, China
Guangzhou, China
Shanghai, China
Hong Kong
New Delhi, India
Mumbai, India
Calcutta, India
Bangalore, India
Tokyo, Japan
Kyungki-do, Korea
Penang, Malaysia
Singapore
Taiwan County, Taiwan

Asia

Shanghai, China
Taiwan County, Taiwan

EMEA

Bristol, UK

USA

Concord, MA, USA

*Includes agents with OIPT trained engineers

For information on our Flexible Support Agreements please visit our Support pages

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