IonFab®500Plus - Ion Beam Tool for High Precision Deposition

Ionfab500Plus

Ionfab 500Plus - for High Precision Optical Thin Films

Designed for ultra high quality optical thin films, the Ionfab500Plus was first supplied in 1983 and was the world’s first commercial ion beam sputter deposition system for ring laser gyroscope manufacture. In recent years customers have demonstrated mirrors exhibiting < 20ppm on a commercially available system using the Ionfab500Plus.

The Ionfab500Plus Ion Beam Deposition System has been developed for the requirements of customers demanding high throughput. This is delivered by the use of the 4 x 10” planetary substrates and the ability to use 14” targets. Another key benefit to customers requiring high throughput is the use of up to 3 targets, meaning that different material layers may be deposited without breaking vacuum.

We work closely with our customers to develop new and customised processes according to their application needs; please contact us for details. 

• High Quality Mirror Coatings 
• Support 
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Transmission Spectrum of a mirror designed for 633nm at 45°, deposited in the Ionfab500Plus showing:

Mirror Loss	< 40 ppm
Uniformity	< ± 0.0005
Surface roughness	< 0.11nm

Excellent refractive index (RI) control and uniformity provides high product yield.

Transmission Spectrum of a mirror designed for 633nm at 45°

 

 - A Global Reach

Oxford Instruments is committed to supporting our customers’ success. We recognise that this requires world class products complemented by world class support. Our global service force is backed by regional offices, offering rapid support wherever you are in the world.

 

 

Service Centres*		Parts Centres
Europe & Middle East Montevrain, France Wiesbaden, Germany Haifa, Israel St Petersburg, Russia Moscow, Russia Bristol, UK USA Arizona, USA Texas, USA San Francisco, CA, USA Concord, MA, USA	Asia Beijing, China Guangzhou, China Shanghai, China Hong Kong New Delhi, India Mumbai, India Calcutta, India Bangalore, India Tokyo, Japan Kyungki-do, Korea Penang, Malaysia Singapore Taiwan County, Taiwan	Asia Shanghai, China Taiwan County, Taiwan EMEA Bristol, UK USA Concord, MA, USA
*Includes agents with OIPT trained engineers

For information on our Flexible Support Agreements please visit our Support pages