Range of Process tools for
Etch, deposition and Growth
Oxford Instruments manufactures a range of systems, offering process solutions for etching, deposition and growth of advanced materials on micro- and nanometre scales.
These solutions are based on core technologies in:
- Plasma Etch & Deposition
- Atomic Layer Deposition (ALD)
- Ion Beam Etch & Deposition
- Nanoscale Growth Systems
- Hydride Vapour Phase Epitaxy (HVPE)
Please contact us to discuss your equipment needs in more detail.