Tools from Oxford Instruments Plasma Technology

ALD Atomic Layer Deposition
Range of Process tools for
Etch, deposition and Growth

Oxford Instruments manufactures a range of systems, offering process solutions for etching, deposition and growth of advanced materials on micro- and nanometre scales.

These solutions are based on core technologies in:

  • Plasma Etch & Deposition
  • Atomic Layer Deposition (ALD)
  • Ion Beam Etch & Deposition
  • Nanoscale Growth Systems
  • Hydride Vapour Phase Epitaxy (HVPE)

 

Please contact us to discuss your equipment needs in more detail.

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