Oxford Instruments' software is clear, easy to use, quick to learn and configured exactly for the customer's system. Its visual interface controls and monitors the process tool, and offers the ability to control a tool cluster from a single interface and PC.
Process 'recipes' are written, stored and recalled through the same software, building into a process library. In cassette-to-cassette and cluster systems, the users can associate individual recipes with each wafer to be processed, and run a complete set of process steps, loops and repeats. Password-controlled user login allows different levels of user access and tasks, from 'one-button' run operation to full system functions. Continuous process data logging ensures traceability of each wafer and process GEM/SECS compatible.