InP Etching - Indium Phosphide Etch

RIE 
  • Process gases: CH4/H2
  • Etch rates: 50  - 100 nm/ min
  • Higher rates by Cl addition possible
  • Mask: Photoresist or SiO2
  • Aspect ratio > 5 : 1

 InP RIE

InP RIE: 0.2 µm width for DFB Laser

 

ICP RIE

  • Chlorine based processes
  • Etch rates: 50 nm/ min - 1.5 µm/ min
  • Low damage by low ion energies
  • Selectivity to SiO2:10 - 25 : 1

 Inp ICP

 Anisotropic InP ICP Etch

 

RIBE/ CAIBE

  • Chlorine and CH4/H2 based process
  • Etch rates: up to 300 nm/ min
  • Adjustable wall angle
  • Mask: Photoresist (SEM) or SiO2
  • CAIBE or RIBE possible with RF sources

ICP RIBE

Anisotropic InP RIBE

 

 

Contact Us

Please click here if you would like additional information or assistance

Related Products

Related Information

Etch Processes - Etching Processes
Etch Processes - Etching Processes
Gallium Arsenide/Aluminium Gallium Arsenide Etch (GaAs/AlGaAs)
GaAs/AlGaAs Etching - Gallium Arsenide/Aluminium Gallium Arsenide Etch
AlGaN/GaN Etching - Aluminium Gallium Nitride Etch
Indium Antimonide Etching (InSb)
InSb Etching - Indium Antimonide Etch
InGaAlP Etching - Aluminium gallium indium phosphide Etch
InGaAlP Etching - Aluminium gallium indium phosphide Etch
GaSb Etching - Gallium Antimonide Etch
GaSb Etching - Gallium Antimonide Etch
Deep GaP Etching - Gallium Phosphide Etch
Deep GaP Etching - Gallium Phosphide Etch
ZnSe Etching - Zinc Selenide Etch
ZnSe Etching Zinc Selenide Etch
InAlAs Etching - Indium Aluminium Arsenide Etch
InAlAs Etching - Indium Aluminium Arsenide Etch
InP/ InGaAsP Etching - Indium Phosphide/ Indium Gallium Arsenide Etch
InP/ InGaAsP Etching - Indium Phosphide/ Indium Gallium Arsenide Etch
GaN Etching - Gallium Nitride Etch
GaN Etching, Gallium Nitride Etch, Gallium Nitride Etching
Aluminium Etching (Al)
Aluminium Etch, Al Etching
Au Etching - Gold Etch
Au Etching - Gold Etch
Chromium Etching (Cr)
Cr Etching - Chromium Etch
Cu Etching - Copper Etch
Cu Etching - Copper Etch
Pr Etching - Photoresist Etch
Pr Etching - Photoresist Etch
Silyated Photoresist Etching - Silyated Photoresist Etch
Silyated Photoresist Etching - Silyated Photoresist Etch
Polyimide Etching (PI)
Polyimide Etching - Polyimide Etch
Polymethyl Methacrylate Etching (PMMA)
PMMA Etching - Polymethyl Methacrylate Etch
PDMS Etching - Polydimethylsiloxane Etch
PDMS Etching - Polydimethylsiloxane Etch
Diamond Etching - Diamond Etch
Diamond Etching - Diamond Etch
BCB ICP Etching - Benzocyclobutene Etch
BCB ICP Etching - Benzocyclobutene Etch
LiNbO3 Etching - Lithium Niobate Etch
LiNbO3 Etching - Lithium Niobate Etch
LiTaO3 Etching - Lithium Tantalum Oxide Etch
LiTaO3 Etching - Lithium Tantalum Oxide Etch
SiC Etching - Silicon Carbide Etch
SiC Etching - Silicon Carbide Etch
Lead Zirconium Titanate Etching (PZT)
PZT Etching - Lead Zirconium Titanate Etch
Indium Tin Oxide Etching (ITO)
ITO Reactive Ion Etching - Indium Tin Oxide Etch
Aluminium Oxide Etching (Al2O3 )
Al2O3 Etching - Aluminium Oxide Etch - Sapphire ICP Etching
PbSe Etching - Lead Selenide Etch
PbSe Etching - Lead Selenide Etch
Bi2Te3 Etching - Bismuth Telluride Etch
Bi2Te3 Etching - Bismuth Telluride Etch
Ta2O5 Etching - Tantalum Pentoxide Etch
Ta2O5 Etching - Tantalum Pentoxide Etch
GST Etching - Germanium Antimony Telluride Etching
GST Etching - Germanium Antimony Telluride Etching
Mo Etch - Molybdenum Etch
Mo Etch - Molybdenum Etch
Nb Etching - Niobium Etch
Nb Etching - Niobium Etch
Ni Etching - Nickel Etch
Ni Etching - Nickel Etch
NiCr Etching - Nichrome Etch
NiCr Etching - Nichrome Etch
Pt Etching - Platinum Etch
Pt Etching - Platinum Etch
Ta Etching - Tantalum Etch
Ta Etching - Tantalum Etch
Ti Etching - Very Deep Titanium Etch
Ti Etching - Very Deep Titanium Etch
TiN Etching - Titanium Nitride Etch
TiN Etching - Titanium Nitride Etch
W Etching - Tungsten Etch
W Etching - Tungsten Etch
WSi Etching - Tungsten Silicide Etch
WSi Etching - Tungsten Silicide Etch
Si Bosch Etching - Silicon Bosch Etch
Si Bosch Etching - Silicon Bosch Etch
Si Cryogenic Etching - Silicon Cryogenic Etch
Si Cryogenic Etching - Silicon Cryogenic Etch
Si Mixed Etching - Silicon (C4F8 - SF6) Etch
Si Mixed Etching - Silicon (C4F8 - SF6) Etch
Si (HBr) Etching - Silicon Hydrogen Bromide Etch
Si (HBr) Etching - Silicon Hydrogen Bromide Etch
Si (isotropic) Etching - Isotropic Silicon Etch
Si (isotropic) Etching - Isotropic Silicon Etch
Silicon Germanium Etching (SiGe)
SiGe Etching - Silicon Germanium Etch
SOI Bosch Etching - Silicon-on-Insulator Bosch Etch
SOI Bosch Etching - Silicon-on-Insulator Bosch Etch

Downloads And Links