Diamond Etching - Diamond Etch

Anisotropic Diamond
10 µm deep, anisotropic diamond
etch at 500 nm/ min
The Ti mask was too thin and is eroded.

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System100          System 80Plus

The properties of diamond are unique it is the hardest material known, and it has a very wide optical transparency window (from ~220 nm to ~3.12 μm) allied with a high thermal conductivity (2000 Wm-1K-1), all attractive features for optical and optoelectronic structures. Additionally, it is anticipated that diamond-based electronic devices will deliver outstanding performance due to the material’s high carrier mobility and high breakdown field. There have been recent studies of replacing certain Si MEM's with Thin Diamond MEM's structures
The hardness and chemical inertness of diamond, however, means that the controlled processing of diamond presents a considerable technical challenge. Diamond is usually etched in an O2/Ar mix at high bias to break down the strong C bonds.

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Related Information

Etch Processes - Etching Processes
GaAs/AlGaAs Etching - Gallium Arsenide/Aluminium Gallium Arsenide Etch
InSb Etching - Indium Antimonide Etch
InGaAlP Etching - Aluminium gallium indium phosphide Etch
GaSb Etching - Gallium Antimonide Etch
Deep GaP Etching - Gallium Phosphide Etch
InP Etching - Indium Phosphide Etch
ZnSe Etching Zinc Selenide Etch
InAlAs Etching - Indium Aluminium Arsenide Etch
InP/ InGaAsP Etching - Indium Phosphide/ Indium Gallium Arsenide Etch
GaN Etching, Gallium Nitride Etch, Gallium Nitride Etching
Aluminium Etch, Al Etching
Au Etching - Gold Etch
Cr Etching - Chromium Etch
Cu Etching - Copper Etch
Pr Etching - Photoresist Etch
Silyated Photoresist Etching - Silyated Photoresist Etch
Polyimide Etching - Polyimide Etch
PMMA Etching - Polymethyl Methacrylate Etch
PDMS Etching - Polydimethylsiloxane Etch
BCB ICP Etching - Benzocyclobutene Etch
LiNbO3 Etching - Lithium Niobate Etch
LiTaO3 Etching - Lithium Tantalum Oxide Etch
SiC Etching - Silicon Carbide Etch
PZT Etching - Lead Zirconium Titanate Etch
ITO Reactive Ion Etching - Indium Tin Oxide Etch
Al2O3 Etching - Aluminium Oxide Etch - Sapphire ICP Etching
PbSe Etching - Lead Selenide Etch
Bi2Te3 Etching - Bismuth Telluride Etch
Ta2O5 Etching - Tantalum Pentoxide Etch
GST Etching - Germanium Antimony Telluride Etching
Mo Etch - Molybdenum Etch
Nb Etching - Niobium Etch
Ni Etching - Nickel Etch
NiCr Etching - Nichrome Etch
Pt Etching - Platinum Etch
Ta Etching - Tantalum Etch
Ti Etching - Very Deep Titanium Etch
TiN Etching - Titanium Nitride Etch
W Etching - Tungsten Etch
WSi Etching - Tungsten Silicide Etch
Si Bosch Etching - Silicon Bosch Etch
Si Cryogenic Etching - Silicon Cryogenic Etch
Si Mixed Etching - Silicon (C4F8 - SF6) Etch
Si (HBr) Etching - Silicon Hydrogen Bromide Etch
Si (isotropic) Etching - Isotropic Silicon Etch
SiGe Etching - Silicon Germanium Etch
SOI Bosch Etching - Silicon-on-Insulator Bosch Etch

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